THERMOPHYSICAL PROPERTIES OF METAL FILMS IN NANOMETER SCALE (III)
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Accession number;07A0043215
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| Title;THERMOPHYSICAL PROPERTIES OF METAL FILMS IN NANOMETER SCALE (III) |
| Author;
TAKAHASHI FUMIAKI
(Nagoya Municipal Ind. Res. Inst., JPN)
KATO RYOZO
(Arubakkuriko)
HATTA ICHIRO
(Fukui Univ. Technol., JPN)
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Journal Title;Thermophys Prop
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Journal Code:X0031A
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ISSN:0911-1743
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VOL.27th;NO.;PAGE.39-41(2006)
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| Figure&Table&Reference;FIG.5, REF.7 |
| Pub. Country;Japan |
| Language;Japanese |
| Abstract;Generally, thermophysical properties in an interfacial region depend on a structure. For instance, in an epitaxial superlattice, disordered arrangement of atoms in the interfacial region results in a specific interfacial region with about a few nm and then at this thickness the thermal conductivity was reduced significantly. On the other hand, in a metal film on a substrate a crystal size of the metal becomes larger as being away from the substrate surface. In the present study, we focus our attention to the interfacial region of a metal film on a substrate. We point out that in the measurement of thermophysical properties of a thin film on a thin substrate it is better to carry out the measurement in the direction parallel to the interface as a function of the film thickness, because it is superior to analyze the thermophysical properties of the interfacial region in such an arrangement. We performed the measurement of thermal diffusivity of Au film deposited on mica substrate, polyimide film and ceramics film CLAIST, respectively, as a function of film thickness by an ac calorimetric distance-variation method. To reduce the experimental error caused by the thickness distribution by the substrate we applied the modified thermal diffusivity measurement, in which the differential method was employed, that is, we used a common substrate and on a half part of the substrate a metal film was deposited and the other half part was left open. In this method, both the thermal diffusivity measurement of the deposited sample region and that of only the substrate region were carried out at the same time and then, the thermal conductivity of the thin film could be determined in high accuracy.... (author abst.) |
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