Carbon Nanotube Growth by Remote Plasma CVD for Via Interconnects
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Accession number;07A0247408
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| Title;Carbon Nanotube Growth by Remote Plasma CVD for Via Interconnects |
| Author;
SAKUMA N.
(Mirai-selete(semiconductor Leading Edge Technol., Inc.), Kawasaki, Jpn)
KATAGIRI M.
(Mirai-selete(semiconductor Leading Edge Technol., Inc.), Kawasaki, Jpn)
SAKAI T.
(Mirai-selete(semiconductor Leading Edge Technol., Inc.), Kawasaki, Jpn)
SUZUKI M.
(Mirai-selete(semiconductor Leading Edge Technol., Inc.), Kawasaki, Jpn)
NIHEI M.
(Mirai-selete(semiconductor Leading Edge Technol., Inc.), Kawasaki, Jpn)
SATO S.
(Mirai-selete(semiconductor Leading Edge Technol., Inc.), Kawasaki, Jpn)
HYAKUSHIMA T.
(Mirai-selete(semiconductor Leading Edge Technol., Inc.), Kawasaki, Jpn)
AWANO Y.
(Mirai-selete(semiconductor Leading Edge Technol., Inc.), Kawasaki, Jpn)
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Journal Title;Abstracts. Fullerene, Nanotubes General Symposium
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Journal Code:L1472A
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ISSN:
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VOL.32nd;NO.;PAGE.44(2007)
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| Figure&Table&Reference; |
| Pub. Country;Japan |
| Language;English |
| Abstract; |
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