Science Links Japan | 1st Korea Japan Conf Positioning Technol 2002

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1st Korea Japan Conf Positioning Technol 2002

Ultraprecision Positioning Technology in Japan
Study on Aerostatic Lead Screw-Influence of Thermal Expansion of Male Screw-
Improvement of the Motion Accuracy Using Transfer Function in Linear Motion Bearing Guide
A Compact Surface Motor Stage Equipped with a Surface Encoder
Development of a Unique High Precision Linear motor Integrated Air Slide Table and its Application to Laser Beam Writer
Analysis on the positioning error of an aerostatic stage
Thermal Deformation Drift of a Nanometer Positioning Device
Feeding Behavior of Screw Drive Table (Comparison of Sliding Screw Drive and Ball Screw Drive)
Performance Evaluation of Self-moving Cell Linear Motor for Ultra-precision Nano Positioning
A Study on Microscopic Behavior of Preloaded Ball Screw for Ultra-precise Positioning
Experimental Analysis on Thermal Characteristics of Hydrostatic Guideway for Precision Positioning
A study on Thermal Characteristics of Linear Motor for High Speed Machine Tools
Is It Possible to Detect and Control Friction in Positioning?
Couplings for Ball-screws on High Precision Positioning.
Comparison of Sliding Mode Control and Classical PID Control Applied to Fast Tool Servo
Development of an automatic run out measuring instrument in radius direction for ball screw
Development and Application of Straightness Measurement System for Surface Machining Process
Compact absolute length measuring machine using regular crystalline surface and laser interferometry
A Flatness Measuring System for Large Silicon Wafers
Volumetric interferometer for absolute coordinate metrology
A five degree-of-freedom surface encoder
Variation in Ultra-Precision Displacement Sensor Performance with Temperature and Practical Resolution
High Power Heterodyne Laser Interferometers for Multiple Axes Measurements
Forward Kinematic Calibration Method for Parallel Mechanism Using Pose Data Measured by a Double Ball Bar System
A Measuring Method for Three-DOF Displacement by Using Spherical Reflector
Development of a System for Measuring Inner & Outer Diameters of Automobile Hub
A High-precision Angle Sensor for Measurement of Stage Angular Motions
Development of precise adjustment mechanisms for X, Y,.THETA.x, and .THETA.y using impact drive piezo actuators
Experimental Investigation of the Three-axis NanoSlider in the Inertial Sliding Mode and Stick Mode Positioning
A Spatial Six-Dof Hybrid In-Parallel Actuated Mechanism for Fine Positioning within a Large Working Space
A4 DOF micro-positioning stage with nanometer resolution and coupled motion
Microfactory and Micro Machine Tools
The Nonlinear Spring Behavior of A Linear RoUing Guideway and Circular Interpolation Contouring Error at Quadrant Change
Piezo-driven linear motion stage with smooth motion, large travel range and high resolution
Development of a Positioning System of Miniature Universal Testing Machine
Displacement Characteristics of Microactuators Made of Thin Film Metallic Glass
Design of Long Stroke Dual Servo 6-axis Actuator
Development of the non-resonance type ultra-sonic motor and its application for XY-stage
6-axis Fine Actuator with VCMs and Solenoids
Motion Error Correction with Squeeze Gas Bearing Driven by Piezoelectric Actuators
Study on Accuracy Improvement of Parallel Kinematic Machine-Compensation Methods for Thermal Expansion of Link and Machine Frame-
Study for Improvement of Tracking Accuracy of the Feeding System with Iron Core Type Linear DC Motor by Neural Network Control
Damping Compensator for Automatic Tracking to the Vibration Mode of Elastic Feeding Mechanism
Practical Control for Two-mass Positioning Mechanism
Kinematic Design of a Planar Parallel Manipulator
Actively-Controlled Hydrostatic Thrust Bearing using a Floating Disk and a Voice Coil Motor
FEM analysis of micro-stage
A Study on Open-Loop Precise Positioning of Piezoelectric Actuator
A Proposal of a Position Control with Acceleration Feedback Loops (An Application to a Ball Screw Drive One-Axis Stage)
Quick Assessment of Positioning Errors of a Machine Tool using a Cube Array Artifact and a Touch Probe
A Proposal of a Position Control with Two Acceleration Feedback Loops (An Application to a Linear Motor Drive One-Axis Stage)
Stabilized tracking control of the scanning tunneling microscope tip by referring regular crystalline lattice