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> Kuki Seijo to Kontamineshyon Kontororu Kenkyu Taikai Yokoshu
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Kuki Seijo to Kontamineshyon Kontororu Kenkyu Taikai Yokoshu
17th
Removal of chemical compounds from outside air by air washer (part 3) The influence of the temperature and humidity of inlet air on removal efficiency.
Study on removal efficiency of chemical compounds in air by air washer and vapor condensation.
Measurement of removal efficiency for inorganic compounds by air washer (Part 2).
The possibility of impurities measuring in the clean room air by NVRM.
Estimation Method Of Service Life In Chemical Filter.
Study on effective removal of amines by various chemical filter media.
Removal efficiency of acid gas mixture using ceramic chemical filter.
Characterization of removal-behavior on Airborne-molecular contaminants
from various chemical air filter media.
Removal of gaseous contaminants by activated carbon. Part 2 Study on estimate method of lifetime of adsorbent.
The adsorptive characteristics of organic compounds by the activated carbon fiber.
The Development of gas removal textile media with three dimensional structure for chemical filter.
Removal of gaseous organic impurities using a ceramic chemical filter.
Estimates of concentration of gaseous contaminants in clean room air.
Outgassing Behavior of Cleanroom Construction Materials and Polymers.
Evaluation of outgas from cleanroom interior materials under actual conditions.
Evaluation of organic gaseous contaminants in cleanroom. (Part 2) Characteristics of adsorption for Si wafer adsorbor tube.
Transfer and diffusion behavior of VOC generated in cleanroom.
Measurement of size and spatial distribution of fine particles by 2-color laser light scattering method.
Developmental research on the technique visualizing distribution and behavior of particles in the air by scanning laser beam.
Developmental Research on the Technique visualizing Behaviour of Dust in the Air by PTV technique.
Development of a toxic gas monitor in indoor by a monitoring tape method.
The evaluation of residual service life of activated carbon filter.
Establishment of performance test for HEPA filters with silica particles.
Comparative Study of Challenge Aerosols for Performance Test of Air filters.
Statistical Study on Stationary Re-measurement of Filter Leakage Test. Development of HEPA filter leakage testing method.
Study on indoor pollution by microbes in a house and the environmental factors.
A comparison of air-sampler efficiencies.
Elimination of living particle in food display case applicated with UV/Photoelectron Method. Study on airbore bacteria removal and surface contamination control.
A decrease effect on attached microorganisms inside of air conditioners treated with antimicroorganism agents.
Amount of microorganism in accumulated dust of air conditioning duct.
Effect on Bactericidal Activities on Air-Filter Paper with Immobilized Enzymes.
Basic research on sterilization of air borne bacteria by electronic flash.
Development of portable airborne bacteria sampler.
Development of infection free bio-clean unit.
Determination formaldehyde and VOC concentration in air and emission rates from wood products and adhesive using a chamber test method (Part 2).
Study on control of indoor air pollutant by bake out method.
Thermal property of VOC emissions from building materials.
Study on removal of gaseous contaminants in dwelling by TiO2-photocatalytic reaction.
Measurement of volatile organic compounds generated from human being.
Examination of Simultaneous Determination of Volatile Organic Compounds and Very Volatile Organic Compounds in Indoor Air.
Measurement investigation for VOCs concentration change in newly-built houses.
Study on indoor air quality (Part. 2). Results from field measurement in the multiple dwelling house.
Study on emission rate of formaldehyde at the apartment building. Part 1 Basic study of the sampling device for formaldehyde.
Study on emission rate of formaldehyde at the apartment building. Part 2 Study of Formaldehyde from interior materials.
Study on emission rate of formaldehyde at the apartment building. Part 3 Field measurement of formaldehyde.
Formaldehyde emission from wood-based materials and formaldehyde concentration of indoor air.
A development on removal equipment of indoor contaminants using by diffusion scrubber method. Part 1 Principle and outline of removal equipment.
A development on removal equipment of indoor contaminants using by diffusion scrubber method. part 2 An evaluation experiment for removal efficiencies of HCHO, NH3, SO2 and HCl.
A Development on Removal Equipment of Indoor Contaminants using Diffusion Scrubber Method. Part 3 System for Continuous Removing of Water-Soluble Gas (HCHO, NH3, SO2) in Air.
Characteristics of water mist generated by cooling towers and shower apparatus.
Development of cleanroom wallpaper controlled out-gassing contamination.
An ULPA filter with low generation of airborne molecular contaminants.
Development of UULPA filter with low boron glass media.
Removal of gaseous organic compounds and ionic matter in air by wet type air cleaner.
Evaluation of cationic contaminants in cleanroom. The effect of wafer carrier cleaning.
Improvement of the collection efficiency of gaseous contaminants in clean room.
Control of organic contamination by selection of cleanroom materials.
Removal of Organic Contaminants in Cleanroom.
The behavior of spot metallic contamination on thermal oxide.
Evaluation of Organic Contaminants on Silicon Wafer by Using Metallic Carrier Case.
Surface contamination on excimer laser optical components induced by silicon compounds.
Study on the organic contamination on substrate surface in cleanroom.
QC (Quick Change) washing-New IC wafer washing by quick change method of DI water in rinse bath (2) Evaluation of rinse effect by measurement of ionic concentration and resistivity in rinsing water.
Performance Evaluation of A Chemical Filter for Elimination of Gaseous Organic Matter.
Theoretical Adsorption Model of Molecular Contamination on Silicon Wafer.
Study on numerical analysis of natural ventilation.
Air Flow Simulation around Semiconductor Equipment for Local Clean Area by Computational Fluid Dynamics.
Study on local clean system in clean room (4). Characterization of air flow and fine particles around Automated Guided Vehicle.
Study on Local Clean System in Clean Room. Estimates of the particle contamination by the worker's action on clean area.
The effect of the insect repellent air curtain using the unbalanced air flow (Part 2).
Development of preventive method of local contaminated area by particles around manufacturing tools.
The comparison of HEPA filter's performance used by Chinese and Japanese media.
Theoretical description of electret fibrous filter under dust load.
Technical revolution by high performance PTFE air filter. Creation of ultra high pure and energy saving environment.
PTFE fiber layer composite high performance filter bag media.
Particle Removal Process in a Large Size Wafer Stocker by the Particle Remover using UV/Photoelectron Charging.
Removal of gaseous pollutants in a cleanroom with photocatalytic reaction (3). Dependence of decomposition ratio of toxic products on TiO2 coated area and flow rate.
Destruction of gaseous pollutants using photocatalyst under irradiation of UV light (2). Identification of products and estimation of reaction mechanism.
Effect of UV/photoelectron and photocatalyst cleaning methods to electrical properties of MOS capacitors. Vessel material dependence.
Research and development of sterilization on an account of removing coloid filters (II).
The development of the clean room ceiling system from the celling back which it is possible to access.
Study on mini-environment technology in clean room (Part. 3). The valuation of simulation model about thermal clean room.
Development of the test machine for dust generation from moving mechanisms.
Investigation of trace analysis of silane, phosphine and arsine using gas chromatograph mass spectrometry.
Performance evaluation of newly developed ceramic emitters.
The thermally assisted charge elimination of LCD glass substrates.
Study on the influence of induction charging in wet processes.
Basic characteristics of the double injection ionizer.
Development of ionization system distributing ions through tubes of small diameter (part 2).
Dust Explosion and It's Preventative Measure in CVD Exhaust Duct of IC Manufacturing Facility.
Removal performance of the purification equipment using UV/Photoelectron method and its application to indoor air environment.
Considerations over contaminant reduction in a sickroom by a purification equipment that uses UV/photoelectron.
Decomposition of gaseous aldehydes using mist-chamber collection and photocatalytic reaction.
Collection and destruction of gaseous pollutants in air using artificial lung and photocatalytic reaction.
Development of removal device for gaseous contaminants by titania photocatalysis combined with corona discharge.
Intrusion of airborne pollen into indoor environment (part 2).
Characterization of airborne particles in indoor environment by He-MIP method.
Study on the behavior of allergens in indoor environment. (Part 16) Field survey of living mites, mite- and cat-allergens in Shinshu district of four years.
Cat-allergen survey in dwellings.
Investigation of Duct Cleaning Records-2.
Analysis of indoor air quality during operating air cleaner.
On comparison of performance of indoor air-cleaners (Part 4) Summary of the difference among fan-filter type, ion type and ion-fan type.
Interaction of Particulate and Gaseous Matter in Sidestream Cigarette Smoke.
Size control of negative ions.
Study on removal of trace gaseous contaminants using micro droplets collections.
Experimental analysis of performance of porous media utilized in absorption of aerosols by liquid.
Study on the air cleaning system with removal of malodor and microorganism.
A study on relationship between ozone and odor (odorant) in room air in natural airlation.
Odor analyzer utilized with thermal desorption tube.
The performance and application of odor removal Filter (Part 2). The correlation between odor sensitivity test and GC/MS analyzing test.
Studies on the antibacterial air filter.
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