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LASTI Annu Rep
6
NewSUBARU Storage Ring
Beamlines
Improvement of Beam Lifetime
Coherent Radiation in the Millimeter and Sub Millimeter Wavelengths in the NewSUBARU Storage Ring
Development of turn-by-turn transverse phase space monitor
Circumference and COD Control
Bunch Lengthening by a Betatron Motion in Quasi-Isochronous Storage Rings
CSR Observation
Dipole Correction Scheme of deflection by IDs
Quadrupole Correction Scheme of Thne Shift by IDs
New Control System of IDs
Laser Compton Back-scattering Gamma-ray Beamline-BL01
Time Domain Characterization of New SUBARU Optical Klystron Radiation by Optical Sampling with a Mode-Locked Laser
Actinic Mask Inspection Using an EUV Microscope
Development of Fast-Photospeed Chemically Amplified Resist in Extreme Ultraviolet Lithography
Reflectance change in Mo/Si multilayer mirrors caused by intense EUV irradiation
Evaluation and comparison of six kinds of interferometers installed on EUV Experimental Interferometer
Large-Area X-ray Lithography System for LIGA Process Operating in Wide Energy Range of Synchrotron Radiation
Fluid Filter Fabricated by Deep X-ray Lithography for Micro Fluidics
Development of 3D-LIGA Process and Fabrication of Spiral Microcoil
Study on 3-dimentional micro probe using X-ray lithography
Fabrication of Spiral Micro-Coil Utilizing LIGA Process
Confirmation and Readjustment of BL6 Optics
Formation process of microtuberances on poly (tetrafluoroethylene) surface by synchrotron radiation exposure
Electronic structure of Au-Si(100) interface as a function of Au coverage
Studies on Droplet Target for LPP-EUV Source
Studies on Cryogenic Xe Capillary Jet Target for Laser-Produced Plasma EUV Source
Characteristics of EUV Emission from Rotating Cryogenic Xe Target
Laser wavelength dependence of EUV conversion efficiency in laser-produced plasmas
Laser Plasma EUV Emission using Lithium Target
Theoretical Results of Laser Plasma EUV Source using Lithium Target
Generation of Liquid Li Jet Target for LPP-EUV Source
Current Development Topics of Gas Cluster Ion Beam Process
Development of a Size Selected Gas Cluster Ion Beam System for Low-Damage Processing
COULOMB EXPLOSION FOLLOWING ELECTRONIC EXCITATION IN ION-SOLID INTERACTION
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